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Semiconductor Engineering22 September 2026

Wafer-Scale Sub-5nm Channel Monolayer MoS2 Transistors (CMU, UF, MIT et al.)

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Semiconductor Engineering

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Executive Briefing & Key Highlights

Researchers at Carnegie Mellon University, University of Florida, MIT, Texas A&M University et al. published a technical paper titled “Wafer-scale 2D MoS₂ transistors with sub-5 nm channel length and subthreshold performance beyond the silicon limit.” Abstract Excerpt “Here, we report monolayer MoS₂ transistors with physical channel lengths below 5 nm, achieving a subthreshold swing of 88 mV/dec..

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